AFM Laboratory

Maximum 1000 particles per m³. Essential for reliable AFM and MEMS fabrication and characterization, free of environmental interference.

2nd floor, room 24. Technical University of Cluj-Napoca, Bd. Muncii 103-105. Accessible to visiting researchers and industrial partners by arrangement.

Surface topography imaging and nanocharacterization at sub-nanometre resolution.

Quantitative material properties — hardness and elastic modulus — at the nanoscale.

Adhesion, nanofriction and nanowear characterization.

Dynamic behavior analysis of vibrating MEMS microresonators.

Temperature-controlled measurements from −10°C to 160°C.

Biomedical investigations in a controlled liquid environment using the Bio AFM module.

Research-grade AFM/SPM system from the XE series (Cross-Talk Elimination), with fully decoupled, flexure-guided closed-loop XY and Z scanners — eliminating the cross-talk artifacts typical of conventional tube scanners for accurate, bow-free images. XY scan range: up to 100 × 100 μm; Z range: 12–15 μm. Accepts samples up to 100 mm diameter and 20 mm thickness. Sub-nanometre resolution in true Non-Contact mode. Equipped with a nanoindentation module, sample thermal control (−10°C to 160°C) and an acoustic enclosure. Supports all standard and advanced SPM modes: Contact, Non-Contact, Tapping, KPFM, MFM, EFM, nanoindentation, nanotribology and liquid-environment imaging (Bio AFM).

The laboratory's second AFM system, used alongside the XE-70 for nanomechanical and nanotribological characterization. Enables high-resolution, sub-nanometre topographic imaging, adhesion force measurements, nanofriction analysis via Lateral Force Microscopy (LFM), and mechanical property investigations of thin films and MEMS materials. Extends the laboratory's capacity with dedicated availability for systematic measurement series and comparative sample testing.

Enables quantitative local mechanical characterization of materials at the nanoscale: hardness and Young's elastic modulus (via the Oliver–Pharr method). Uses a piezo-actuated Berkovich diamond tip mounted on a rigid cantilever. Indentation range: 12 μm; displacement resolution: 0.1 nm; applicable force: 100 nN – 100 μN; force resolution: 100 nN. Supports single-point or automated grid (batch) measurements. Applicable to thin films, metals, polymers, ceramics and biomaterials. Topographic images of residual indentation marks are subsequently acquired in Non-Contact mode, enabling quantitative analysis of the indentation area.

Enables investigation of biological samples and materials immersed in a controlled liquid environment. Features a universal liquid cell with temperature control (4°C – 70°C in liquid), chemically resistant to acidic and basic solutions, with liquid/gas perfusion capability and an electrochemical upgrade option. Maximum sample size: 15 mm diameter / 1.5 mm thickness. Applications: cell biology, analytical chemistry, electrophysiology, and characterization of dental and biomedical materials under physiological conditions.

Used for visual inspection and photographic documentation of samples, and for sample positioning ahead of AFM measurements.

New AFM-based method for estimating the stiffness of flexible micro/nano structures.

Experimental determination of energy dissipation in oscillating structures, for operational lifetime estimation.

Full development cycle — design, fabrication and testing — of reliable mass detection sensors.

Design, fabrication and testing of highly flexible micromembranes.

Custom software for estimating the operational lifetime of vibrating MEMS structures.

Advanced nanoscale AFM investigations of dental materials.