n Representative projects

Fabrication of a MEMS switch with robust metal contact
PN-III-P2-2.1-PED-2016-1727  /  Project No. 33PED/ 2017
The project aims to improve the lifetime of MEMS from switching applications by investigating the contact degradation mechanisms at nanoscale and it integration in a chevron structure. 

Advanced design of micromembranes with multiple degrees of freedom for optical MEMS applications
PN-II-RU-TE-2014-4-1271 / 2015 - 2017
Thematic scope of the project includes the design and characterization of MEMS systems in optical applications while the main objective of the research is to identify, analyze and characterize micro flexible membranes with complex geometric structures of the joints, in order to obtain reliable MEMS and optical systems with high life expectancy.

3 Scale modeling for robust-design of vibrating micro sensors (3SMVIB)
FP7 - ERA.Net / 2012 - 2015
This project aims at improving the efficiency of the manufacturing process while decreasing the production cost by considering at the design stage the uncertainties in such a way that a range of the MEMS properties can be predicted for the manufactured products. Six partners from Belgium, Romania and Poland are involved in this project.

Reliability design of RF-MEMS switches for space applications (REDEMS)
Romanian Space Agency - STAR / 2012 - 2015
The Research, Development and Innovation Space Technology and Advanced Research - STAR 
The main focus of this project is orientated on the experimental investigations and methodology for reliability design of MEMS for space applications. Monitoring the flexible component motion for different space conditions is becoming essential, both to evaluate their performance and to development process reliability improvement.

Tribomechanical Characterization of MEMS Materials for Space Applications under harsh environments (MEMSMAT)
Romanian Space Agency - STAR / 2013 - 2016
Research activities are performed in this project in order to determine the behavior of MEMS materials in harsh
environmental conditions from space applications. Analitical models and simulation of mechanical and tribological properties of MEMS materials and structures for different operating conditions are included in project development.
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Micro-Nano Systems Laboratory
Finalized projects
Nano mechanical and Nano tribological characterizations for reliability design of MEMS resonators (NARDEMS) 
PN-II-RU-TE-2011-3-0106 / 2011 - 2014
The scope of this project is mechanical and tribological characterizations of MEMS materials and structures for reliability design of MEMS resonators. Mechanical properties include analysis of the static and dynamic responses of MEMS resonator (micro bridge and micro cantilevers). The tribological investigations include Nano friction and stiction analysis. The resonators are used as the main components in sensors and actuators.