O1. Theoretical approach (TA) - MEMS materials properties analysis and their tribomechanical behavior in different harsh
O2. Test samples (TS) - MEMS materials deposition and MEMS structures (specimens) fabrication.
O3. Mechanical characterization (MC) - Analysis of mechanical properties of MEMS materials and MEMS structures behavior in
different harsh environmental conditions.
O4. Tribological characterization (TC) - Tribological analysis of MEMS materials and MEMS structures under different
O5. Dissemination activities (DA) - Dissemination and standardization of MEMS materials properties and their behaviour in
different space conditions.