Advanced design of micromembranes with multiple degrees of freedom for optical MEMS applications
Microelectromechanical systems (MEMS) find their application in all areas where it is necessary a miniaturization of products such as: aerospace, automotive, chemical, bio-medicine, optical displays, optical and wireless communications etc. MEMS devices are found among: sensors and actuators, switches, micro-robots, optical scanners, micro motors, micropompe etc. Numerous bibliographic sources provided by the literature highlights the growing interest of researchers on MEMS-ins generally, respectively of MEMS-based optical in particular [1-11]. Over the past decade, the telecommunications have become a strong market for optical MEMS devices. This is due to the explosion of internet network systems through fiber optics and digital scanning systems based on optical mirrors of switches and transmission systems for the optical signal. In medical devices, micro-optical scanners have resulted in three-dimensional scanning endoscopic systems.
The main objective of the project titled "Advanced Design of micromembranes with multiple degrees of freedom for optical MEMS applications" is the achievement of flexible structures with complex geometries and high mobility.
Micro conventional membranes based on deformation structure for optical signal processing have a much higher cost than MEMS micromembranes based on complex configurations of joints for obtaining a high mobility.
Thematic scope of the project includes the design and characterization of MEMS systems in optical applications while the main objective of the research is to identify, analyze and characterize micro flexible membranes with complex geometric structures of the joints, in order to obtain reliable MEMS and optical systems with high life expectancy.
In order to achieve the primary objective of the project is forming a team consisting of three researchers with experience in the design, testing and simulation of microsystems and three young PhD students. It follows the development of theoretical models and experimental validation of static and dynamic response of micromembranes for different modes of articulation (hinges) and the determination of the mechanical properties of these membranes. A good knowledge of the behavior of materials and mechanical response of micro membrane is required to achieve reliable MEMS systems with high life expectancy. Knowledge of MEMS material properties and establishment of a database with solutions of micro joints for micromembrane (numerically and experimentally validated) would constitute a real help for designers and manufacturers of MEMS.
2015 - 2017
Proiect finantat de UEFISCDI
Program Resurse Umane - Proiecte tip TE