PN-II-RU-TE-2011-3-0106 / 2011 - 2014
The scope of this project is mechanical and tribological characterizations of MEMS materials and structures
for reliability design of MEMS resonators. Mechanical properties include analysis of the static and dynamic
responses of MEMS resonator (micro bridge and micro cantilevers). The tribological investigations include
Nano friction and stiction analysis. The resonators are used as the main components in sensors and actuators.