Tribomechanical Characterization of MEMS Materials
for Space Applications under Harsh Environments

Publications
Technical University of Cluj-Napoca

National Institute for Research and Development in Microtechnology, IMT Bucharest
2016

C. Birleanu, M. Pustan, R. Müller, C. Dudescu, V. Merie, R. Voicu, A. Baracu (2016) - Experimental investigation by atomic force microscopy on mechanical and tribological properties of thin films, International Journal of Materials Research, 107 (2016) 5, pp. 429 - 438.
C. Birleanu, M. Pustan (2016) - The Effect of Film Thickness on the Tribo-mechanical Properties of the Chrome-Gold Thin Film; Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2016, 30 May - 2 June 2016, Budapest, Hungary, IEEE, ISBN 978-1-5090-1505-4, Section 3B, pp.145-150.
C. Birleanu, M. Pustan, V. Merie,  R. Müller, R. Voicu, A. Baracu and S. Craciun (2016) - Temperature effect on the mechanical properties of gold nano films with different thickness, The 7th International Conference on  Advanced Concepts in Mechanical Engineering, ACME 2016, June 9 - 10, 2016, Iasi, Romania, section I - 12, HYPERLINK "http://iopscience.iop.org/journal/1757-899X" IOP Conference Series: Materials Science and Engineering vol. 147 (2016).
V. Merie, C. Bîrleanu, M. Pustan, G. Negrea and I. Pintea (2016) - Analysis on temperature effect on the mechanical and tribological properties of titanium nitride thin films, The 7th International Conference on Advanced Concepts in Mechanical Engineering, ACME 2016, June 9 - 10, 2016, Iasi, Romania, section I - 4, HYPERLINK "http://iopscience.iop.org/journal/1757-899X" IOP Conference Series: Materials Science and Engineering vol. 147 (2016).
C. Birleanu, M. Pustan, C. Dudescu, V. Merie  and I. Pintea (2016)- Analysis of the bending stiffness and adhesion effect in RF-MEMS structures, The 13th International Conference on Tribology ROTRIB’16 September 22-24, 2016 - Gala?i, ROMANIA.
C. Birleanu, M. Pustan (2016) - The Effect of Film Thickness on the Tribo-mechanical Properties of the Chrome-Gold Thin Film, Microsystem Technologies, under review from 20.09.2016.


2015

C. Birleanu, M Pustan (2015) - Analysis of the adhesion effect in RF-MEMS switches using atomic force microscope, Analog Integrated Circuits and Signal Processing, ISSN: 0925-1030 (Print) 1573-1979 (Online), DOI 10.1007/s10470-014-0481-z.
R. Voicu, M. Pustan, C. Birleanu, A. Baracu, R. Muller (2015) - Mechanical and tribological properties of thin films under changes of temperature conditions, Surface and Coatings Technology, doi:10.1016/j.surfcoat.2015.01.026.
V. Merie, M. Pustan, G. Negrea, C. Birleanu, (2015) - Research on titanium nitride thin films deposited by reactive magnetron sputtering for MEMS applications, BRAMAT 2015 - received by Applied Surface Science.
C. Birleanu, R. Müller, M. Pustan, C. Dudescu, R. Voicu, A. Baracu (2015) - Experimental investigation on mechanical and tribological properties of hard thin films coating by atomic force microscopy, EMRS Spring Meeting, Lille, France, 11-15.05.2015.
C. Birleanu, M. Pustan, R. Müller, C. Dudescu, V.Merie, R. Voicu, A. Baracu (2015) - Experimental investigation by atomic force microscopy on mechanical and tribological properties of thin films, HYPERLINK "mailto:ijmr@is.mpg.de"International Journal of Materials Research, Ref.No.: MR4912R2 acceptat spre publicare in 02.12.2015.
A. Baracu, R. Voicu, C. Obreja Jonhatan (2015) - Natural frequency of polysilicon bridges used in vibration applications, 41st Edition of International Conference on Micro and Nano Engineering - MNE, 21-24 Septembrie 2015, The Hague, The Netherlands.


2014

1. Birleanu, C., Pustan, M. (2014) - Analysis of the adhesion effect in RF-MEMS switches using atomic force microscope, DTIP, Design, Test, Integration & Packaging of MEMS/MOEMS 01-04 April 2014, Cannes, France, pp. 146-152, ©EDA Publishing/DTIP 2014 ISBN: 978-2-35500-028-7, IEEE Catalog Number: CFP14DTI-PRT, http://cmp.imag.fr/conferences/dtip/dtip2014/documents/DTIP2014 _Program.pdf.

2. Merie, V., Pustan, M., Bîrleanu, C., Negrea, G. (2014) - The Influence of Substrate on the Mechanical and Tribological Characteristics of MEMS Materials for Space Applications,  The 6th International Conference on  Advanced Concepts in Mechanical Engineering, ACME 2014, June 12 - 13, 2014, Iasi, Romania
Agentia Spatiala Româna
Space Technology and Advanced Research - Programme for Research, Development and Innovation - STAR
Romana