Tribomechanical Characterization of MEMS Materials
for Space Applications under Harsh Environments

Project objectives
Technical University of Cluj-Napoca

National Institute for Research and Development in Microtechnology, IMT Bucharest
O1. Theoretical approach (TA) - MEMS materials properties analysis and their tribomechanical behavior in different harsh
environmental conditions.

O2. Test samples (TS) - MEMS materials deposition and MEMS structures (specimens) fabrication.

O3. Mechanical characterization (MC) - Analysis of mechanical properties of MEMS materials and MEMS structures behavior in
different harsh environmental conditions.

O4. Tribological characterization (TC) - Tribological analysis of MEMS materials and MEMS structures under different
environmental conditions.

O5. Dissemination activities (DA) - Dissemination and standardization of MEMS materials properties and their behaviour in
different space conditions.



Agentia Spatiala Româna
Space Technology and Advanced Research - Programme for Research, Development and Innovation - STAR
Romana